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Ultra high flow filter element for high generation line wet process

The filter element is suitable for the manufacturing process of high generation line LCD panel. It is mainly used in process points with high flow requirements. The filter element can meet the flow requirement of more than 200L/min, and the exquisite appearance structure can fully meet the space requirements of the equipment. The filter membrane area of more than 2m² not only has the performance of high flow, but also has the performance of high carrying capacity, which can reduce the number of equipment downtime caused by the replacement of filter element during the use of equipment. The filter element has a variety of membrane materials and a variety of precision for selection.

Electronic process water filter element

Electronic process water filter element adopts hydrophilic PES membrane material. Its asymmetric membrane structure makes the filter element greatly prolong the service life of the filter element while ensuring the filtration efficiency, and effectively saves the filtration cost of the system. It is suitable for filtration of weak acid / alkali and ultra pure water.

60T/h Super large flow filter element

60T/h Super large flow filter element is a filter element with large diameter, no central rod, single opening, and unique flow direction design from inside to outside. The super large flow reduces the use of filter element and filter. A variety of filter membrane materials can be selected to meet different application requirements.

Ultra high precision terminal filter element with low precipitation

The ultra-high precision terminal filter element with low precipitation adopts hydrophilic PES membrane material and is specially designed for ultra pure water terminal filtration. It has ultra-low ion precipitation, extremely fast resistivity recovery ability and greatly reduces on-line washing time. The highest filtration accuracy is 0.02 μm, which ensures the effluent quality of terminal ultra pure water.

Terminal absolute filter element for photoresist

Terminal absolute filter element for photoresist is specially designed for filtering photoresist. It adopts high flow rate, high-precision PTFE or nylon filter membrane, combined with low precipitation HDPE framework, with extremely low dissolution, and is suitable for terminal filtration of photoresist. It can select a variety of filtration precision from 0.02 to 10 μ m, which can meet different filtration requirements. It can be customized according to the application and customer needs.

Filter element for polishing fluid deep filtration

The filter element for polishing fluid deep filtration adopts unique winding design and can accurately filtrate CMP and effectively intercept large particles and release effective particles. The gradient structure from the outside to the inside increases the space for contaminants and prolongs the service life of the filter element.

Filter element with ultra-high carrying capacity

The filter element with ultra-high carrying capacity is made of multi-layer nano-fiber material, which has high carrying capacity for pollutants under reasonable gradient structure design. The characteristic of multi-stage interception of the gradient aperture from coarse to fine makes the filter element have stronger carrying capacity, and be able to effectively improve the problem of fast surface clogging, which greatly prolongs the service life of the filter element. The filtration precision of 0.5-90μm can meet the requirements of different filtration precision, and it is very suitable for filtration of high suspended particles, colloidal substances and high viscosity liquid.

Fan filter unit (FFU)

Provides clean air for clean rooms and laboratories in the semiconductor and flat-panel display industries by removing harmful particles from circulating air in conjunction with high efficiency / ultra high efficiency plate filters. Different from the clean room air supply ceiling system, FFU produces positive pressure, which reduces the risk of potential ceiling bypass leaks.

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